Ultra-Compact Low-Cost Terahertz Integrated Circuits

Terahertz imaging is becoming an increasingly important non-destructive evaluation method, with biomedical, security, aerospace, and materials characterization applications. However, unlike microwave-based systems, terahertz devices cannot be cheaply mass produced as integrated circuits, limiting their potential.

In this invention, a compact, low-cost terahertz source has been developed that may be easily integrated into several common high-frequency integrated circuit designs, such as microstrip and coplanar waveguide.  In operation, the source, palladium or platinum strips or nanowires, emits terahertz radiation upon Joule heating caused by applying a low frequency voltage. The source is electromagnetically coupled to antennas via integrated circuit techniques, and the terahertz radiation emitting from the antennas is collimated by a silicon lens. The required power to generate the radiation is extremely low, on the order of 15 nW. The UMass Terahertz Laboratory has successfully demonstrated the technology in a number of applications, including characterizing RNA flowing through a nanofluidic channel and imaging the crystalline polymer PHB.

•       Design enables mass produced, low-cost terahertz imaging devices

•       At < 10 µm in size, terahertz source is readily integrable into common high-frequency circuit designs

•       Low power: ~15 nW

•       Operable at room temperature – cryogenic cooling not required

•       Uses low DC voltage (2 – 5 V)

•       Benchtop THz detectors

•       Ultra-compact THz spectrometers that identify materials such as water layers, biomolecules, and explosives